Institute of Fundamental Technological Research

The wear of contacting silicon surfaces in microelectromechanical systems (MEMS) has been a longstanding concern. To address this issue, the effects of immersing silicon surfaces into alkali metal chloride solutions (LiCl, NaCl, CsCl) on their sliding friction and wear were investigated. A custom-built reciprocating tribometer was used with a sapphire ball as the counterbody. Results indicated that the friction coefficient between the silicon surface (p-doped, orientation (100)) and a sapphire ball can be reduced by up to 30% by treating the silicon surfaces in aqueous salt solutions (concentration 1 mol/L, exposure for 24 h). These modified surfaces also have higher wear resistance and a significant change in wettability. After immersion, the contact angle between the silicon surface and water was reduced by approximately 50%. These results may lead to new, simple, and inexpensive methods to increase the wear resistance of silicon surfaces for use in MEMs devices.

silicon surface, wear, friction, alkali metal chlorides