| 1. | Abetkovskaya S.O.♦, Chizhik S.A.♦, Pogoskaya I.V.♦, Rimuza Z.♦, Jarząbek D.M.♦, Mikhalovski M.♦, Linke Ya.♦, Determining the Young Modulus of Nanosize Thickness Coatings for MEMS from the Results of Static Force Spectroscopy, Bulletin of the Russian Academy of Sciences: Physics, ISSN: 1062-8738, DOI: 10.3103/S1062873812090031, Vol.76, No.9, pp.1009-1011, 2012 Abstract:A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson–Kendall–Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate Affiliations:| Abetkovskaya S.O. | - | A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY) | | Chizhik S.A. | - | A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY) | | Pogoskaya I.V. | - | A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY) | | Rimuza Z. | - | Warsaw University of Technology (PL) | | Jarząbek D.M. | - | other affiliation | | Mikhalovski M. | - | other affiliation | | Linke Ya. | - | Warsaw University of Technology (PL) |
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