Institute of Fundamental Technological Research

The movement of a micro cantilever was detected via a self constructed portable data acquisition prototype system which integrates a linear array of 32 1D amorphous silicon position sensitive detectors (PSD). The system was mounted on a microscope using a metal structure platform and the movement of the 30 µm wide by 400 µm long cantilever was tracked by analyzing the signals acquired by the 32 sensor array electronic readout system and the relevant data algorithm. The obtained results show a linear behavior of the photocurrent relating X and Y movement, with a non-linearity of about 3%, a spatial resolution of less than 2 µm along the lateral dimension of the sensor as well as of less than 3 µm along the perpendicular dimension of the sensor, when detecting just the micro-cantilever, and a spatial resolution of less than 1 µm when detecting the holding structure.

amorphous semiconductors, silicon, devices, systems

The position of a 40 μm wide by 400 μm long cantilever in a microscope was detected by a 32 lines array of 1D amorphous silicon position sensitive detectors (PSD). The sensor was placed in the ocular used for the CCD camera of a microscope and the alignment, focusing and positioning of the cantilever was achieved using the X–Y–Z translation table of the microscope that has a micrometer resolution controller. In this work we present results concerning the micro positioning of a cantilever and its holding structure through the reflected light that is detected by 1D/3D psd and converted to an analog signal proportional to the movement. The signal given by the 32 sensor array was analyzed directly without any electronic readout system or data algorithm. The obtained results show a linear behavior of the photovoltage relating X and Y movement, a non-linearity less than 2% and spatial resolution of 600 μV/μm.

Amorphous Semiconductors, Silicon, Devices