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Partner: M. Mikhalovski

Ostatnie publikacje
1.Abetkovskaya S.O.♦, Chizhik S.A.♦, Pogoskaya I.V.♦, Rimuza Z.♦, Jarząbek D.M.♦, Mikhalovski M.♦, Linke Ya.♦, Determining the Young Modulus of Nanosize Thickness Coatings for MEMS from the Results of Static Force Spectroscopy, Bulletin of the Russian Academy of Sciences: Physics, ISSN: 1062-8738, DOI: 10.3103/S1062873812090031, Vol.76, No.9, pp.1009-1011, 2012

Streszczenie:

A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson–Kendall–Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate

Afiliacje autorów:

Abetkovskaya S.O.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Chizhik S.A.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Pogoskaya I.V.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Rimuza Z.-Politechnika Warszawska (PL)
Jarząbek D.M.-other affiliation
Mikhalovski M.-other affiliation
Linke Ya.-Politechnika Warszawska (PL)
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