Partner: M. Mikhalovski


Ostatnie publikacje
1.Abetkovskaya S.O., Chizhik S.A., Pogoskaya I.V., Rimuza Z., Jarząbek D.M., Mikhalovski M., Linke Ya., Determining the Young Modulus of Nanosize Thickness Coatings for MEMS from the Results of Static Force Spectroscopy, Bulletin of the Russian Academy of Sciences: Physics, ISSN: 1062-8738, DOI: 10.3103/S1062873812090031, Vol.76, No.9, pp.1009-1011, 2012

Streszczenie:

A method for the nanoidentation of resistance coatings 1–100 nm thick and intended for use in microelectromechanical systems is proposed on the basis of atomic-force microscopy (AFM). The elastic moduli of the coatings are determined using three models of contact: the Hertz model, the Johnson–Kendall–Roberts model and the Makushkin model, with and without allowance for the influence of a solid substrate

Afiliacje autorów:

Abetkovskaya S.O.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Chizhik S.A.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Pogoskaya I.V.-A.V. Lykov Heat and Mass Transfer Institute National Academy of Sciences of Belarus (BY)
Rimuza Z.-Politechnika Warszawska (PL)
Jarząbek D.M.-other affiliation
Mikhalovski M.-other affiliation
Linke Ya.-Politechnika Warszawska (PL)